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Committees
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Members of the International Steering Committee of the EMLC and Members of the International Technical Program Committee of the EMLC 2008 (*) Conference Chair Dr. Uwe Behringer (*), UBC Microelectronics, Ammerbuch, Germany
Program Chairs Dr. W. Maurer (*), InfineonTechnologies AG, Munich, Germany Mr. J. Waelpoel (*), ASML, Veldhoven, The Netherlands
| Mr. F. Abboud |
Intel Corp., Santa Clara, CA, USA |
| Dr. M. Arnz |
Carl Zeiss SMT AG, Oberkochen, Germany (*) |
| Mr. E. Baracchi |
ST Microelectronics, Agrate Brianza, Italy |
| Dr. C. Blaesing |
Carl Zeiss SMS GMbH, Jena, Germany |
| Mr. P Chen |
Taiwan Mask Corp., Hsinchu, Taiwan (*) |
| Dr. C. Constantine |
Oerlikon USA Inc., St. Petersburg, FL, USA (*) |
| Prof. R. Engelstad |
University of Wisconsin, Madison, WI, USA |
| Mr. B.G. Eynon |
Sematech-Samsung Assignee, Albany, USA (*) |
| Mr. D. Farrar |
HOYA Corporation, LONDON, UK |
| Mr. M. Fischer |
KLA Tencor GmbH, Puchheim, Germany |
| Mr. O. Fortagne |
Vistec Semiconductor Systems GmbH, Jena, Germany |
| Mr. C. Gale |
Applied Materials, Dresden, Germany(*) |
| Mr. B. Grenon |
Grenon Consulting, Inc., Colchester, VT, USA (*) |
| Mr. H. Hartmann |
s3solution, Munich, Germany |
| Mr. N. Hayashi |
Dai Nippon Printing Co. Ltd., Saitama, Japan (*) |
| Dr. A.C. Hourd |
Compugraphics International Ltd., Glenrothes, Scotland, UK (*) |
| Mr. R. Jonckheere |
IMEC, Leuven, Belgium (*) |
| Dr. C.K. Kalus |
Synopsys GmbH, Aschheim, Germany (*) |
| Mr. K.R. Kimmel |
AMTC, Dresden, Germany (*) |
| Ms. B. Lauche |
Photronics MZD GMbH, Dresden, Germany |
| Mr. H. Lehon |
KLA-Tencor Corporation, San Jose, CA, USA |
| Dr. H. Loeschner |
IMS Nanofabrication AG, Vienna, Austria (*) |
| Mr. B. Naber |
Cadence Design Systems Inc., San Jose, USA (*) |
| Mr. J. Perrocheau |
JEMI-France, Rousset, France |
| Dr. Ch. Pierrat |
Cadence Design Systems Inc., San Jose, USA (*) |
| Mr. E. Rausa |
Oerlikon USA Inc., Saint Petersburg, FL, USA (*) |
| Dr. C. Reita |
CEA-LETI, Grenoble, France |
| Mr. D. J. Resnick |
Molecular Imprints, Austin, TX, USA (*) |
| Dr. F. Reuther |
micro resist technology GmbH, Berlin, Germany |
| Dr. C. Romeo |
ST-Microelectronics, Agrate Brianza, Italy (*) |
| Mr. K. Ronse |
IMEC, Leuven, Belgium |
| Prof. H. Scheer |
University of Wuppertal, Germany (*) |
| Mr. Gerd Scheuring |
Mue Tec GmbH, Munich, Germany |
| Dr. R. Schnabel |
VDE/VDI-GMM, Frankfurt, Germany (*) |
| Mr. M. Staples |
AMD Saxony LLC & Co. KG, Dresden, Germany |
| Mrs. I. Stolberg |
Vistec Semiconductor Systems GmbH, Jena, Germany (*) |
| Dr. S. Tedesco |
CEA-LETI, Grenoble, France (*) |
| Mr. M. Tissier |
Toppan Photomasks S.A., Rousset, France (*) |
| Mr. G. Unger |
Qimonda Dresden GmbH & Co. OHG, Dresden, Germany (*) |
| Mr. J.T. Weed |
SYNOPSYS, Inc., Mountain View, CA, USA |
| Mr. J. Whittey |
Vistec Semiconductor Systems, Oakdale, USA (*) |
| Mr. J. Wiley |
Brion Technologies, Santa Clara, CA, USA |
| Mr. H. Wolf |
Photronics MZD GmbH, Dresden, Germany (*) |
| Mr. N. Yoshioka |
Renesas Technology Corp., Tokyo, Japan |
| Mr. L. Zurbrick |
KLA-Tencor Corporation, San Jose, CA, USA (*) | |
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